High-quality film production for next generation devices
ULVAC Inc. has announced the successful launch of PZT piezoelectric thin-film sputtering technology and a high volume manufacturing (HVM) solution to solve technical issues that have hindered the development of MEMS devices, which are crucial in applications from autonomous driving to next generation wearable terminals (such as smart glasses). The company has begun selling production systems incorporating the new technology. Evolutions in technologies such as 5G and AI are expected to accelerate the journey towards smart societies, in which the digitisation of all types of industries will improve industrial performance and enhance convenience for people. With increasing levels of multi-functionality found in autonomous driving, AR/VR, security, and smartphone applications, actuators are needed in order to activate devices based on signals received from various types of sensors. Demand for actuators is projected to explode and key issues in their development have come to the fore, including the need for miniaturization, reduced production costs, lower power consumption, and higher performance. It used to be impossible to fabricate PZT piezoelectric thin films, which constitute the key technology in sensors and actuators, using a low-temperature process with the conventional coating method (Sol-Gel). However, in 2015, ULVAC successfully developed the world’s most advanced technology for forming PZT piezoelectric thin films using a low-temperature sputtering process. ULVAC has continued developing this as next-generation MEMS technology. By further advancing this proprietary technology, ULVAC has reduced running costs by optimizing system operation and has greatly improved the technology’s reliability, which is critical for device commercialization. The result is a groundbreaking mass-production technology that is now incorporated into systems ULVAC has begun to sell. This technology allows MEMS devices to be integrated with semiconductors (CMOS), and enables other positive outcomes such as miniaturisation, reduced production costs, lower power consumption, and higher performance. It is expected to pave the way […]